OWI 100 ECO

High precision and low cost workshop interferometer OWI 100 ECO for spherical and plano optics with driven motion for Z-axis.

Metrology
Interferometry
Form Measurement
Radius Measurement

Highlights

  • Rigid granite tower with integrated active isolation system for maximum precision and vibration-neutral measurements in the production environment
  • Joystick for infinitely adjustment of the measuring table with clearance-free bearings on linear slides
  • Table driven by servo motor and ball screw spindle and speed adjustable by joystick (infinitely variable)
  • Manual fine adjustment using fine thread screw with high precission roller guides
  • 3-Axis table (only Z-Axis in basic machine; different X-Y versions on option)
  • Various Interferometer modules: MarOpto 4", Zygo VeriFire
  • 4“ bayonet interface for reference spheres, compatible to Zygo, Zeiss F-Aplanar etc.

System advantage

  • Ideal economic cost/performance ratio
  • Highest rigidity due to granite base and passive air bearing elements
  • Fine adjustment by precision drive and clearance free precision bearings

Options

  • Tip and tilt table for plano measuring
  • Phase shifter and software evaluation OptoTech μShape OWI for maximum accuracy and logging
  • Heidenhain linear measuring system for accurate absolute determination of radii; mounted near the optical axis to adhere to the „Abbe“ comparation principle
  • Inspect Mini 4“  
  • MarOpto FI 1100 + µShape
  • Zygo Verifire 4“ + Zygo Mx
OWI 100 ECO
Application

Non-Contact Measuring of Spheres

Measuring Range Diameter (4“ spheres)0 mm - 100 mm
Measuring Range RadiusDepending on reference sphere
Travel Z 0 mm - 800 mm
Interface4” bajonett interface
Measuring Accuracyup to ʎ/20 (depending on reference sphere)
Power Requirement (others on request)1 kW
DimensionsWidth: 1180 mm, Height: 2330 mm, Depth: 800 mm
Weight (approx.)825 kg; Without Module
DisclaimerAll data are subject to change without notice. Please verify details with OptoTech.


Asia & Australia

Your contact person

Asia & Australia

[email protected] +852 3568 3243
The Americas

Your contact person

The Americas

[email protected] +1 215 679 2091
 EMEA Region

Your contact person

EMEA Region

[email protected] +49 641 49939 819